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Properties of metal doped tungsten oxide thin films for NO_x gas sensors grown by PLD method combined with sputtering process
Bibliographic Information
- Title
- Properties of metal doped tungsten oxide thin films for NO_x gas sensors grown by PLD method combined with sputtering process
- Author
- Hiroharu Kawasaki
Journal
-
- Sensors and Actuators B : Chemical 100
-
Sensors and Actuators B : Chemical 100 4-, 2004
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Details 詳細情報について
-
- CRID
- 1010282256867794819
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN