Sensitivity Improvement of Diaphragm Type Ultrasonic Sensors by Complementary Piezoelectric Polarization
書誌事項
- タイトル
- Sensitivity Improvement of Diaphragm Type Ultrasonic Sensors by Complementary Piezoelectric Polarization
- 著者
- Kaoru Yamshita
収録刊行物
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- Technical digest of the 13^<th> International Conference on Sensors, Actuators and Microsystems (Transducers '05) 2
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Technical digest of the 13^<th> International Conference on Sensors, Actuators and Microsystems (Transducers '05) 2 2115-2118, 2005