Vacuum vapor deposition of PFPE molecules on CHx, CHxNy and CHxFy amorphous carbon surface
Bibliographic Information
- Title
- Vacuum vapor deposition of PFPE molecules on CHx, CHxNy and CHxFy amorphous carbon surface
- Author
- M. Kawaguchi, J. Choi, T. Kato
Journal
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- Microsystem Technologies 13,8-10
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Microsystem Technologies 13,8-10 1432-1437, 2007
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Details 詳細情報について
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- CRID
- 1010282256906938260
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- Article Type
- journal article
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- Data Source
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- KAKEN