- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- 【Updated on June 30, 2025】Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography
Bibliographic Information
- Title
- Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography
- Author
- Inho, Song, R., Smruti, Mohanty, Masato, Watanabe, Toru, Kawamura, Akitoshi, Okino, Kazuhiko, Horioka, Eiki, Hotta
Journal
-
- Journal of Plasma Fusion Research Vol.81, No.9
-
Journal of Plasma Fusion Research Vol.81, No.9 647-648, 2005
- Tweet
Details 詳細情報について
-
- CRID
- 1010282256906973456
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN