Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography
Bibliographic Information
- Title
- Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography
- Author
- Inho, Song, R., Smruti, Mohanty, Masato, Watanabe, Toru, Kawamura, Akitoshi, Okino, Kazuhiko, Horioka, Eiki, Hotta
Journal
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- Journal of Plasma Fusion Research Vol.81, No.9
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Journal of Plasma Fusion Research Vol.81, No.9 647-648, 2005
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Details 詳細情報について
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- CRID
- 1010282256906973456
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- Article Type
- journal article
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- Data Source
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- KAKEN