Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space

Bibliographic Information

Title
Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space
Author
Kaoru, Sato, et. al.

Journal

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Details 詳細情報について

  • CRID
    1010282256910297103
  • Article Type
    journal article
  • Data Source
    • KAKEN

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