Plasma-Induced Subsurface Reactions in Plasma Processing
Bibliographic Information
- Title
- Plasma-Induced Subsurface Reactions in Plasma Processing
- Author
- H. Fujiyama and M. Shinohara
Journal
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- Proceedings of the 5th Asia-Pacific International Symposium on Basics and Applications of Plasma Technology (APSPT-5) vol.1
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Proceedings of the 5th Asia-Pacific International Symposium on Basics and Applications of Plasma Technology (APSPT-5) vol.1 16-19, 2007
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Details
-
- CRID
- 1010282256953366020
-
- Article Type
- journal article
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- Data Source
-
- KAKEN
