Plasma-Induced Subsurface Reactions in Plasma Processing
書誌事項
- タイトル
- Plasma-Induced Subsurface Reactions in Plasma Processing
- 著者
- H. Fujiyama and M. Shinohara
収録刊行物
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- Proceedings of the 5th Asia-Pacific International Symposium on Basics and Applications of Plasma Technology (APSPT-5) vol.1
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Proceedings of the 5th Asia-Pacific International Symposium on Basics and Applications of Plasma Technology (APSPT-5) vol.1 16-19, 2007