Low-temperature direct bonding of glass nanofluidic chips using a two-step plasma surface activation process
書誌事項
- タイトル
- Low-temperature direct bonding of glass nanofluidic chips using a two-step plasma surface activation process
- 著者
- Y.Xu, C.Wang, Y.Dong, L.Li, K.Jang, K.Mawatari, T.Suga, T.Kitamori
収録刊行物
-
- Analytical and Bioanalytical Chemistry
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Analytical and Bioanalytical Chemistry 402 1011-1018, 2012