Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering

Bibliographic Information

Title
Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering
Author
T.Kawamoto, T.Yanagitani, M.Matsukawa, Y.Watanabe, Y.Mori, S.Sasaki, M.Oba

Journal

Related Projects

See more

Details 詳細情報について

  • CRID
    1010282257071989252
  • Article Type
    journal article
  • Data Source
    • KAKEN

Report a problem

Back to top