Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering
Bibliographic Information
- Title
- Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering
- Author
- T.Kawamoto, T.Yanagitani, M.Matsukawa, Y.Watanabe, Y.Mori, S.Sasaki, M.Oba
Journal
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- Jpn.J.Appl.Phys.
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Jpn.J.Appl.Phys. 2010
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Details 詳細情報について
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- CRID
- 1010282257071989252
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- Article Type
- journal article
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- Data Source
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- KAKEN