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Piezoelectric Pb(Zr_<0.52> Ti_<0.58>)O_3 thin film on single crystal diamond : structural, electric, dielectric, and field effect transistor properties
Bibliographic Information
- Title
- Piezoelectric Pb(Zr_<0.52> Ti_<0.58>)O_3 thin film on single crystal diamond : structural, electric, dielectric, and field effect transistor properties
- Author
- M.Y.Liao, Y.Gotoh, T.Tsuji, K.Nakajima, M.Imura, Y.Koide
Journal
-
- Journal of Applied Physics 107
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Journal of Applied Physics 107 24101-, 2010
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Details 詳細情報について
-
- CRID
- 1010282257072252832
-
- Article Type
- journal article
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- Data Source
-
- KAKEN