Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
Bibliographic Information
- Title
- Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
- Author
- K.Kobari, Y.Yamamoto, M, Sakuma, S.Akao, T.Tsuji, K.Yamanaka
Journal
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- Japanese Journal of Applied Physics 48(7)
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Japanese Journal of Applied Physics 48(7) 2009
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Details 詳細情報について
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- CRID
- 1010282257072629519
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- Article Type
- journal article
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- Data Source
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- KAKEN