Lateral Crystallization of Amorphous Silicon Films Induced by Flash Lamp Annealing
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- 大平 圭介
- 北陸先端科学技術大学院大学
書誌事項
- タイトル
- Lateral Crystallization of Amorphous Silicon Films Induced by Flash Lamp Annealing
- 著者
- Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura
収録刊行物
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- Proceedings of the Seventh Thin-Films Materials and Devices Meeting
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Proceedings of the Seventh Thin-Films Materials and Devices Meeting 2011
