Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy
Bibliographic Information
- Title
- Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy
- Author
- S.Inamoto, J.Yamasaki, E.Okunishi, K.Kakushima, H.Iwai, N.Tanaka
Journal
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- J.Appl.Phys.
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J.Appl.Phys. 107 2010
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Details 詳細情報について
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- CRID
- 1010282257077622029
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- Article Type
- journal article
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- Data Source
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- KAKEN