Effect of CW Laser Annealing on Silicon Surface for Application of Power Device
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- 金子 智
- 神奈川県産業技術センター
書誌事項
- タイトル
- Effect of CW Laser Annealing on Silicon Surface for Application of Power Device
- 著者
- Satoru Kaneko, Takeshi Ito, Kensuke Akiyama, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Yasuo Hirabayashi, Takeshi Ozawa, Akira Matsuno, Takashi Nire, Hiroshi Funakubo and Mamoru Yoshimoto
収録刊行物
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- World Academy of Science, Engineering and Technology
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World Academy of Science, Engineering and Technology 74 1150-1152, 2011