Preparation of Cr(N,0) thin films by RF reactive unbalanced magnetron sputtering
Bibliographic Information
- Title
- Preparation of Cr(N,0) thin films by RF reactive unbalanced magnetron sputtering
- Author
- Jun Shirahata, Tetsutaro Ohori, Hiroki Asami, Tsuneo Suzuki, Tadachika Nakayama, Hisayuki Suematsu, Yoshiharu Nakajima, Koichi Niihara
Journal
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- Thin Solid Films
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Thin Solid Films 519[11] 3497-3500, 2011
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Details 詳細情報について
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- CRID
- 1010282257107720322
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- Article Type
- journal article
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- Data Source
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- KAKEN