Preparation of Cr(N,0) thin films by RF reactive unbalanced magnetron sputtering

Bibliographic Information

Title
Preparation of Cr(N,0) thin films by RF reactive unbalanced magnetron sputtering
Author
Jun Shirahata, Tetsutaro Ohori, Hiroki Asami, Tsuneo Suzuki, Tadachika Nakayama, Hisayuki Suematsu, Yoshiharu Nakajima, Koichi Niihara

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Details 詳細情報について

  • CRID
    1010282257107720322
  • Article Type
    journal article
  • Data Source
    • KAKEN

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