Periodic Nanopattern Formation on Si with Femtosecond-Laser-Induced Surface Plamon Polaritons
Bibliographic Information
- Title
- Periodic Nanopattern Formation on Si with Femtosecond-Laser-Induced Surface Plamon Polaritons
- Author
- K. Miyazaki and G. Miyaji
Journal
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- Proceedings of the 13th International Symposium on Laser Precision Microfabrication
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Proceedings of the 13th International Symposium on Laser Precision Microfabrication #12 2012
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Details 詳細情報について
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- CRID
- 1010282257126883482
-
- Article Type
- journal article
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- Data Source
-
- KAKEN