Fabrication of Micro Tube Array by Combining Positive with Negative Type Photoresists due to Solubility Difference in Developer

Bibliographic Information

Title
Fabrication of Micro Tube Array by Combining Positive with Negative Type Photoresists due to Solubility Difference in Developer
Author
Kazutoshi Otsuka, Kenta Takahashi, Akira Kawai

Journal

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Details 詳細情報について

  • CRID
    1010282257127194498
  • Article Type
    journal article
  • Data Source
    • KAKEN

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