Formation of atomically flat beta-FeSi2/Si(100) interface using ion irradiated substrate.
Bibliographic Information
- Title
- Formation of atomically flat beta-FeSi2/Si(100) interface using ion irradiated substrate.
- Author
- M. Sasase, H. yamamoto, H. Kurata
Journal
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- Thin Solid Films
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Thin Solid Films 520 3490-3492, 2012
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Details 詳細情報について
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- CRID
- 1010282257140302336
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- Article Type
- journal article
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- Data Source
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- KAKEN