Formation of atomically flat beta-FeSi2/Si(100) interface using ion irradiated substrate.

Bibliographic Information

Title
Formation of atomically flat beta-FeSi2/Si(100) interface using ion irradiated substrate.
Author
M. Sasase, H. yamamoto, H. Kurata

Journal

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Details 詳細情報について

  • CRID
    1010282257140302336
  • Article Type
    journal article
  • Data Source
    • KAKEN

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