Large aperture focusing ofX-rays with micro pore optics using dry etching silicon wafers

Bibliographic Information

Title
Large aperture focusing ofX-rays with micro pore optics using dry etching silicon wafers
Author
Y. Ezoe、T. Moriyama、T. Ogawa、T. Kakiuchi、I. Mitsuishi、K. Mitsuda、T. Aoki、K. Morishita、K. Nakajima

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Details 詳細情報について

  • CRID
    1010282257154961281
  • Article Type
    journal article
  • Data Source
    • KAKEN

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