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Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering
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- Honda Yoshio
- 名古屋大学
Bibliographic Information
- Title
- Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering
- Author
- Tetsuya Yamamoto, Akira Tamura, Shigeyoshi Usami, Tadashi Mitsunari, Kentaro Nagamatsu, Shugo Nitta, Yoshio Honda, and Hiroshi Amano
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 55 2016
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Details 詳細情報について
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- CRID
- 1010282257210267524
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- Article Type
- journal article
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- Data Source
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- KAKEN