Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering
-
- Honda Yoshio
- 名古屋大学
Bibliographic Information
- Title
- Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering
- Author
- Tetsuya Yamamoto, Akira Tamura, Shigeyoshi Usami, Tadashi Mitsunari, Kentaro Nagamatsu, Shugo Nitta, Yoshio Honda, and Hiroshi Amano
Journal
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 55 2016
- Tweet
Details 詳細情報について
-
- CRID
- 1010282257210267524
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN