Mechanical and electrical properties of micron-thick nitrogendoped tetrahedral amorphous carbon coatings
Bibliographic Information
- Title
- Mechanical and electrical properties of micron-thick nitrogendoped tetrahedral amorphous carbon coatings
- Author
- Y.-J. Jang, Y.-J. Kang, K. Kitazume, N. Umehara, J.-K. Kim
Journal
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- Diamond and Related Materials
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Diamond and Related Materials 69 121-126, 2016
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Details 詳細情報について
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- CRID
- 1010282257213447562
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- Article Type
- journal article
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- Data Source
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- KAKEN