Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma
Bibliographic Information
- Title
- Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma
- Author
- Hideki Ono
Journal
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- 18th International Symposium on Plasma Chemistry
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18th International Symposium on Plasma Chemistry 2007
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Details 詳細情報について
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- CRID
- 1010282257423310621
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- Article Type
- journal article
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- Data Source
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- KAKEN