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X-ray photoelectron spectroscopy study of dielectric constant for Si compounds
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- HIROSE Kazuyuki
- Japan Aerospace Exploration Agency
Bibliographic Information
- Title
- X-ray photoelectron spectroscopy study of dielectric constant for Si compounds
- Author
- 廣瀬和之
Journal
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- Applied Physics Letters 89
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Applied Physics Letters 89 2006
- Tweet
Details 詳細情報について
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- CRID
- 1010282257423549959
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- Article Type
- journal article
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- Data Source
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- KAKEN