Detecting Real Oxygen Ions in Polycrystalline Diamond Thin Film using Secondary Ion Mass Spectrometry
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- SAKAGUCHI Isao
- 物質・材料研究機構
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- OHASHI Naoki
- 物質・材料研究機構
Bibliographic Information
- Title
- Detecting Real Oxygen Ions in Polycrystalline Diamond Thin Film using Secondary Ion Mass Spectrometry
- Author
- 中川翼、坂口勲、羽田肇、大橋直樹
Journal
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- Japanese Journal of Applied Physics Part 1, 46
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Japanese Journal of Applied Physics Part 1, 46 3391-3393, 2007
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Details 詳細情報について
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- CRID
- 1010282257435879820
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- Article Type
- journal article
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- Data Source
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- KAKEN