Flexible Electro-Rheological (ER) Microvalve Based on Flexible SU-8 Cantilever structures
Bibliographic Information
- Title
- Flexible Electro-Rheological (ER) Microvalve Based on Flexible SU-8 Cantilever structures
- Author
- J.W.Kim, K.Yosida, K.Kohda, S.Yokota
Journal
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- Proc. 10th Int. Conf. in Mechatronics Technology (ICMT2006)
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Proc. 10th Int. Conf. in Mechatronics Technology (ICMT2006) 2006
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Details 詳細情報について
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- CRID
- 1010282257466458129
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- Article Type
- journal article
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- Data Source
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- KAKEN