Crystallinity Control of Electroplated Interconnections for Improving Their Stability and Lifetime
オープンアクセス
書誌事項
- タイトル
- Crystallinity Control of Electroplated Interconnections for Improving Their Stability and Lifetime
- 著者
- Jiatong Liu, Ken Suzuki, Hideo Miura
収録刊行物
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- ASME2016 International Mechanical Engineering Congress and Exposition IMECE2016, Proceedings
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ASME2016 International Mechanical Engineering Congress and Exposition IMECE2016, Proceedings IMECE2016 2016