Micro Electronic and Mechanical Systems(Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice)

Bibliographic Information

Title
"Micro Electronic and Mechanical Systems(Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice)"
Author
Masashi Ikeuchi, Koji Ikuta
Publisher
  • IN-TECH
Pagination
514

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Details

  • CRID
    1020000782055199360
  • Title Language Code
    ja
  • Data Source
    • KAKEN
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