Micro Electronic and Mechanical Systems(Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice)
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- IKEUCHI Masashi
- Nagoya University
Bibliographic Information
- Title
- "Micro Electronic and Mechanical Systems(Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice)"
- Author
- Masashi Ikeuchi, Koji Ikuta
- Publisher
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- IN-TECH
- Pagination
- 514
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Details
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- CRID
- 1020000782055199360
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- Title Language Code
- ja
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- Data Source
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- KAKEN