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Micro Electronic and Mechanical Systems "Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice" (pp.1-14)
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- IKEUCHI Masashi
- Nagoya University
Bibliographic Information
- Title
- "Micro Electronic and Mechanical Systems "Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice" (pp.1-14)"
- Author
- Masashi Ikeuchi, Koji Ikuta
- Publisher
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- INTECH
- Pagination
- 514
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Details 詳細情報について
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- CRID
- 1020000782055199361
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- Title Language Code
- ja
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- Data Source
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- KAKEN