Elucidation of Corrosion Mechanism for Copper in Organic Acid Environment and Its Application to Microfabrication Technology

About This Project

Japan Grant Number
JP18K04763 (JGN)
Funding Program
Grants-in-Aid for Scientific Research
Funding Organization
Japan Society for the Promotion of Science

Kakenhi Information

Project/Area Number
18K04763
Research Category
Grant-in-Aid for Scientific Research (C)
Allocation Type
  • Multi-year Fund
Review Section / Research Field
  • Basic Section 26050:Material processing and microstructure control-related
Research Institution
  • Muroran Institute of Technology
Project Period (FY)
2018-04-01 〜 2023-03-31
Project Status
Completed
Budget Amount*help
4,160,000 Yen (Direct Cost: 3,200,000 Yen Indirect Cost: 960,000 Yen)

Research Abstract

Potentiostatically polarized tests of copper tubes in copper formate solution were conducted to investigate the corrosion behavior of pure copper by using electrochemical method. Three kings of copper tubes were used as a specimen; oxygen free copper(OFC) without phosphorous, phosphorous deoxidized copper(PDC) with about 0.02% phosphorous and highly corrosion-resistant copper contains 0.2-0.3% phosphorous. It takes about one month to generate the corrosion by the immersion test. However, it is possible to reproduce the corrosion for one day by the potentiostatically polarized tests. It is found that the corrosion morphology depends on the phosphorous contents. Ant nest corrosion with branched micropits occurred in the OFC and PDC tubes, while hemispherical pits occurred in the highly corrosion-resistant copper tubes.

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