Elucidation of Corrosion Mechanism for Copper in Organic Acid Environment and Its Application to Microfabrication Technology
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- SAKAI Masahiro
- Principal Investigator
- 室蘭工業大学
About This Project
- Japan Grant Number
- JP18K04763 (JGN)
- Funding Program
- Grants-in-Aid for Scientific Research
- Funding Organization
- Japan Society for the Promotion of Science
Kakenhi Information
- Project/Area Number
- 18K04763
- Research Category
- Grant-in-Aid for Scientific Research (C)
- Allocation Type
-
- Multi-year Fund
- Review Section / Research Field
-
- Basic Section 26050:Material processing and microstructure control-related
- Research Institution
-
- Muroran Institute of Technology
- Project Period (FY)
- 2018-04-01 〜 2023-03-31
- Project Status
- Completed
- Budget Amount*help
- 4,160,000 Yen (Direct Cost: 3,200,000 Yen Indirect Cost: 960,000 Yen)
Research Abstract
Potentiostatically polarized tests of copper tubes in copper formate solution were conducted to investigate the corrosion behavior of pure copper by using electrochemical method. Three kings of copper tubes were used as a specimen; oxygen free copper(OFC) without phosphorous, phosphorous deoxidized copper(PDC) with about 0.02% phosphorous and highly corrosion-resistant copper contains 0.2-0.3% phosphorous. It takes about one month to generate the corrosion by the immersion test. However, it is possible to reproduce the corrosion for one day by the potentiostatically polarized tests. It is found that the corrosion morphology depends on the phosphorous contents. Ant nest corrosion with branched micropits occurred in the OFC and PDC tubes, while hemispherical pits occurred in the highly corrosion-resistant copper tubes.