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Improvement of the performance of Three Dimensional large scale stage by simultaneous measurement of location and metrological frame
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- FURUTANI RYOSHU
- Principal Investigator
- 東京電機大学
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- OZAKI Miyu
- Co-Investigator
- 東京電機大学
About This Project
- Japan Grant Number
- JP24560305 (JGN)
- Funding Program
- Grants-in-Aid for Scientific Research
- Funding Organization
- Japan Society for the Promotion of Science
Kakenhi Information
- Project/Area Number
- 24560305
- Research Category
- Grant-in-Aid for Scientific Research (C)
- Allocation Type
-
- Multi-year Fund
- Review Section / Research Field
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- Science and Engineering > Engineering > Mechanical engineering > Intelligent mechanics/Mechanical systems
- Research Institution
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- Tokyo Denki University
- Project Period (FY)
- 2012-04-01 〜 2015-03-31
- Project Status
- Completed
- Budget Amount*help
- 5,330,000 Yen (Direct Cost: 4,100,000 Yen Indirect Cost: 1,230,000 Yen)
Research Abstract
The reference mirrors are placed on each axis of the movable stage with two orthogonal axes. The displacement signal from the laser interferometers is detected, which include the shape of the axes and the profile of reference mirrors. If neither shape of axes nor profile of the reference mirrors exist, this mechanism can measure the tow directional location of stage. In order to measure the shape of axes and the profile of reference mirrors, the signal is detected by the laser interferometers, making the stage move. The shape of the axes and the profile of reference mirrors are separated in two dimensional direction from the signal from the laser interferometers. Moreover, adding one axis to the above results, The shape of the axes and the profile of reference mirrors are separated in three dimensional direction.
