Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

Details 詳細情報について

• CRID

  1050001201935174272

• NII Article ID

  120000904922

• NII Book ID

  AA00543431

• ISSN

  00036951

• HANDLE

  2433/24190

• Text Lang

  en

• Article Type

  journal article

• Data Source

  • IRDB
  • CiNii Articles