Abstract
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学術論文 (Article)
科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13～H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン)
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Journal
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- TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems
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TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems 1 778-781, 2003
Institute of Electrical and Electronics Engineers
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Details 詳細情報について
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- CRID
- 1050001202728558464
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- HANDLE
- 10097/48057
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- Text Lang
- en
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- Article Type
- journal article
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- Data Source
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- IRDB