Abstract
application/pdf
学術論文 (Article)
科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13～H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン)
145741 bytes
Journal
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- Technical Digest of the 16th International Vacuum Microelectronics Conference, 2003.
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Technical Digest of the 16th International Vacuum Microelectronics Conference, 2003. 233-234, 2003
Institute of Electrical and Electronics Engineers
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Details 詳細情報について
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- CRID
- 1050001202763500288
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- NII Article ID
- 120002338940
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- HANDLE
- 10097/48058
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- Text Lang
- en
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- Article Type
- journal article
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- Data Source
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- IRDB
- CiNii Articles