Surface Modification of Glass Substrate by Ion Beam Irradiation of Ionic Liquid BMIM-PF_6

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  • イオン液体BMIM-PF_6イオンビーム照射によるガラス基板の表面改質
  • イオン エキタイ BMIM-PF ₆ イオンビーム ショウシャ ニ ヨル ガラス キバン ノ ヒョウメン カイシツ

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Abstract

Ionic liquids(ILs) are known to be potential solvents for green chemistry in the recent years, which are molten salt at room temperature with a high ionic conductivity of order of 100mS/cm and unmeasurably low vapor pressure.In this study, we developed an ionic liquid ion source(ILIS) consisting of carbon tip and investigated irradiation effects on a glass substrate with respect to surface smoothing. As a result, it was found that surface roughness irradiated with ion beam of BMIM-PF_6 at 4kV and fluence of 1×10^15 ions/cm^2 was decreased.

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