書誌事項
- タイトル別名
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- Transparent Electrical Conductive In-Sn Oxide Films (II)
- In-Sn サンカブツ トウメイ ドウデンマク
- In-Sn酸化物透明導電膜-2-
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抄録
The purpose of this investigation is to obtain the Sn-doped indium oxide films with high electrical conductivity and high optical transparency by chemical spray deposition method. These films were deposited on Pyrex substrate to find the optimum composition of the spray solution and optimum substrate temperature. The spray solution was composed of indium chloride and stannic chloride in soluvent of H_2O. The optimum substrate temperature during the film deposition was found to be in the range of 600-700℃. The optimum Sn concentration in the spray solution was in the range of 1.6 to 9 at.%. Then. sheet resistivity of films as low as about 6×(10)^<-4> ohm・cm and 88% visible transmission were obtained. Carrier concentration was in the range from 1.7×(10)^<20> to 1.3×(10)^<21>(cm)^<-3>. Hall mobility was in the range of 12-30(cm)^2/V・sec. It was found by X-ray diffraction that these films were composed of indium oxide for spray solution of 10% Sn concentration.
収録刊行物
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- 山口大学工学部研究報告
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山口大学工学部研究報告 30 (1), 105-110, 1979
山口大学工学部
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詳細情報 詳細情報について
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- CRID
- 1050001337449516672
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- NII論文ID
- 110000216464
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- NII書誌ID
- AN00244228
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- ISSN
- 03727661
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- NDL書誌ID
- 2067537
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- 本文言語コード
- ja
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- 資料種別
- departmental bulletin paper
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- データソース種別
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- IRDB
- NDL
- CiNii Articles