Developments on the Uji Proton Microprobe (A. NATURAL SCIENCE)

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  • 宇治プロトンマイクロプローブの開発〔英文〕
  • ウジ プロトン マイクロプローブ ノ カイハツ エイブン
  • 宇治プロトンマイクロプローブの開発(A. 理学)

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Description

The Uji scanning microprobe system has been developed with two doublets configuration. A microcomputer was used for controlling the deflecting voltage dividing the scanning area of 1mm×1mm to 32×32 points and for processing RBS data in MCS mode. The beam size was reduced to 8×34μm^2 with current of ∿1nA. Extraction of this micro beam through a nozzle into the atmosphere was carried out successfully.

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