Synthesis of electroconductive diamond film for application as electrical contact

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Other Title
  • 電気接触子への応用を目指した導電性ダイヤモンド膜の合成
  • デンキ セッショクシ エノ オウヨウ オ メザシタ ドウデンセイ ダイヤモンドマク ノ ゴウセイ
Published
2009-01-16
Resource Type
journal article
Rights Information
  • 電子情報通信学会. 本文データは学協会の許諾に基づきCiNiiから複製したものである。
Publisher
電子情報通信学会

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Description

We try to use electroconductive CVD diamond film as the material for electrical contact. Electroconductive CVD diamond film was synthesized on W plate. Surface morphology, thickness of the deposit, electrical resistance, and so on were measured. The surface morphology should be suitable for electrical contact. Before the deposition of diamond layer, carbide should be synthesized on the substrate. The electrical resistance at pressed condition was measured, and the values were similar to that of W plate, which is the substrate of this CVD process.

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