Development of ID-blade slicer monitoring system for cutting 12-inch silicon ingot

江, 鐘偉, Fujiwara, Shusuke, 長南, 征二, 川嶋, 一夫

doi:10.3233/jae-2002-429

Description

This work is concerned with an experimental study on online measurement of the states of ID saw blade cutting a 12-inch crystal ingot. An online monitoring system consisting of a 3-axis piezoelectric sensor, a three-band digital filter, a digital oscilloscope and computer was developed. Since the acoustical and chatter vibration signals during cutting ingot were complex, they are decomposed in three frequency regions to evaluate the blade extension circumstance, the sharpness of blade edge and the interference between blade and ingot. The proposed ID-Blade slicer monitoring system is validated for evaluation of the blade slicing 12-inch silicon ingots.

Journal

Applied electromagnetism and mechanics

Applied electromagnetism and mechanics 9 539-540, 2001

Japan Society of Applied Electromagnetics

Details 詳細情報について

CRID: 1050011097150640640

NII Article ID: 120006665696

DOI: 10.3233/jae-2002-429

ISSN: 18758800; 13835416

Web Site: https://petit.lib.yamaguchi-u.ac.jp/17090

Text Lang: en

Article Type: conference paper

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