Development of sputter-deposited shape memory alloy thin films and their application to microactuators(Special Issue Reviews)

IR HANDLE Open Access

Bibliographic Information

Other Title
  • 形状記憶合金薄膜の開発とマイクロアクチュエータへの応用(<特集>形状記憶合金研究の新たな展開)

Search this article

Journal

Details 詳細情報について

Report a problem

Back to top