Fabrication of delafossite-type CuAlO_2 doped ZnO(ACZO) transparent conducting films with double-textured structures for thin-film solar cells

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  • 薄膜太陽電池用ダブルテクスチャー型ACZO透明導電膜の作製
  • ハクマク タイヨウ デンチヨウ ダブルテクスチャーガタ ACZO トウメイ ドウデン マク ノ サクセイ

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Delafossite-type CuAlO_2 doped ZnO transparent conducting films (ACZO films) were fabricated through pulsed laser deposition using an ArF excimer laser (λ=193 nm). As a result, excellent electrical properties due to a carrier-depletion effect caused by the addition of copper were obtained : low carrier density of 6.79 × 10^<19> cm^<-3>, and high Hall mobility of 58.3 cm^2/V・s. An average transmittance of 91.5% in the wavelength region of the solar spectrum (400～2500nm) was obtained. For high conversion efficiency as solar cells, double-textured structures with two types of concavo-convexlens were prepared through laser processing. As a result, a high haze ratio of 67.1% due to light confinement effect was obtained.

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