Nitridation of GaAs Substrate by Dimethylhydrazine(DMHy)

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  • ジメチルヒドラジン DMHy オ モチイタ GaAs キバン ノ チッカ ショリ
  • ジメチルヒドラジン(DMHy)を用いたGaAs基板の窒化処理

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Nitridation of GaAs substrate plays an important roll in the initia1 stage of GaN growth on GaAs substrates and the nitridation process gives the strong influence to the quality of epitaxia1 layers. In this paper, the nitridation mechanism is discussed by the use of in-situ reflection high energy electron diffraction method.

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