宇治プロトンマイクロプローブによる元素分布測定〔英文〕

書誌事項

タイトル別名
  • Elemental Mapping with the Uji Proton Microprobe (A. NATURAL SCIENCE)
  • ウジ プロトン マイクロプローブ ニ ヨル ゲンソ ブンプ ソクテイ エイブン
  • 宇治プロトンマイクロプローブによる元素分布測定(A. 理学)

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抄録

The Uji scanning microprobe system has been improved for elemental mapping. By collimation and focusing with a magnetic quadrupole doublet the proton beam size is reduced to 2×6μm^2 with currents of∿10pA. Elemental mapping was performed by scanning the proton beam in both dimensions across the sample surface and by detecting the secondary electron, X-ray and the scattered charged particle from the surface. Some examples of microprobe measurements are presented.

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