Numerical simulation of electron transport in electric and magnetic fields for analysis of electron temperature and number density profiles measured in argon magnetic neutral loop discharge plasma
書誌事項
- タイトル別名
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- Numerical simulation of electron transport in electric and magnetic fields for analysis of electron temperature and number density profiles measured in an argon magnetic neutral loop discharge plasma
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抄録
A Monte Carlo simulation of electron transport in electric and magnetic fields was performed to analyze experimental data of the electron temperature T_e and electron number density n_e measured in a magnetic neutral loop discharge (NLD) plasma driven in Ar at 0.13 Pa. T_e and n_e in the vicinity of the substrate holder were measured with a triple probe, and their radial profiles had peaks at different radial positions. The simulation reproduced these peak positions well under the chosen boundary condition that the electron reflectivity of the side wall was lower than that of the reactor ceiling and the substrate holder. It was explained that the T_e peak was formed by high-energy electrons transported from the neutral loop along a separatrix of the quadrupole magnetic field and that the n_e peak consisted of electrons undergoing reciprocating motion between the reactor ceiling and the substrate.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 49 (8), 086001-1-086001-5, 2010-08-20
Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1050564288960500352
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- NII論文ID
- 120002649857
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- NII書誌ID
- AA12295836
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/13474065
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- HANDLE
- 2115/44420
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- NDL書誌ID
- 10793798
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- 本文言語コード
- en
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- 資料種別
- journal article
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- データソース種別
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- IRDB
- NDL
- Crossref
- CiNii Articles
- KAKEN