太陽電池用四元化合物半導体薄膜の堆積

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  • タイヨウ デンチヨウ 4ゲン カゴウブツ ハンドウタイ ハクマク ノ タイセキ
  • Deposition of quaternary semiconductor thin films for Solar cells

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Abstract

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Characteristics of quaternary stannite-type semiconductor thin films were investigated. These films were deposited on glass substrate by vacuum evaporation or by spray pyrolysis. A thermal treatment in H_2S flow was needed to obtain quaternary films. The optimum conditions for deposition and annealing were studied. Single phase stannite-type films with (112) orientation were obtained when the as-deposited films were annealed at 500℃ in H_2S atmosphere. The resistivity of the films were changed from 10^<-2>Ωcm to 10^3Ωcm with the change of the film composition.

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