Bibliographic Information
- Other Title
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- The Growth of ZnO Films by Metalorganic Chemical Vapor Deposition
- ユウキ キンゾク キソウ セイチョウホウ ニヨル ZNO ハクマク ノ セイチョウ
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Abstract
Zn0 films have been grown by photo−assisted metalorganic chemical vapor deposition with the use of dimethylzinc and diethylether as source materials. The reaction and the decomposition of source materials were observed by in situ measurements of ultraviolet photo-absorption spectra. Specula surface was obtained at the growth temperature of 400~480℃.
Journal
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- 島根大学総合理工学部紀要. シリーズA
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島根大学総合理工学部紀要. シリーズA 35 107-112, 2001-12-24
島根大学総合理工学部
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Details 詳細情報について
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- CRID
- 1050845763414131840
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- NII Article ID
- 110006939800
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- NII Book ID
- AA11157087
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- ISSN
- 13427113
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- NDL BIB ID
- 6251442
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- Text Lang
- ja
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- Article Type
- departmental bulletin paper
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- Data Source
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- IRDB
- NDL
- CiNii Articles