Structure and Optical Properties of Low Cost FTO Thin Films on VariousSubstrate Temperature Using TapWater Solvent

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Abstract

Tin-doped SnO2 (FTO) thin films were successfully grown on glass substrate with the temperature from 200 to 450˚C by spray pyrolysis method. All FTO thin films were characterized by XRD, SEM, AFM, optical transmittance and four-point probe measurements to know the structure and optical properties of the films. In the results, from the XRD, compared with ICDD of SnO2, all the FTO thin films had the tetragonal structure except at 200 ˚C. In addition, it was confirmed that the sheet resistivity decreased with increasing the substrate temperature. The lowest sheet resistivity was 4.33×105 Ω/cm2 at 450 ˚C.

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