Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot
説明
First International Conference on Motion and Vibration Control, held at the Pacific Convention Plaza Yokohma (Pacifico Yokohama), 7-11 September, 1992.
収録刊行物
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- Proceedings of the International Conference on Motion and Vibration Control
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Proceedings of the International Conference on Motion and Vibration Control 443-448, 1992
日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1050855522114980096
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- NII論文ID
- 120006665537
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- 本文言語コード
- en
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- 資料種別
- conference paper
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- データソース種別
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- IRDB
- CiNii Articles