Fabrication of micro/submicron hierarchical structures on ceramic sheet surfaces combining 2-step imprinting and in-plane compression processes

IR (HANDLE) Open Access
  • Taira, Ryoma
    Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyushu University
  • Tsumori, Fujio
    Department of Aeronautics and Astronautics, Faculty of Engineering, Kyushu University

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Description

Many organisms have functional microstructured surfaces. Particularly, lotus leaves have hierarchical dual-scale micro/nanostructures on their surface and exhibit highly water repellent properties. We have developed techniques to fabricate patterns on inorganic material surfaces such as ceramics. Applying these techniques to fabricate hierarchical structures can make ceramic surfaces even more promising. In this paper, we prepared 2 kinds of mold with line-and-space patterns with pitches 50 μm and 2 μm and fabricated micro (rough patterns)/submicron (fine patterns) hierarchical structures on sintered ceramic sheets using a newly developed imprinting process with in-plain compression method. We proposed processes for the fabrication of such hierarchical structures, discussed the possibility of higher resolution of the patterns by comparison with the analytical results.

Journal

Details 詳細情報について

  • CRID
    1050866882762635520
  • NII Book ID
    AA12295836
  • ISSN
    13474065
    00214922
  • HANDLE
    2324/7178642
  • Text Lang
    en
  • Article Type
    journal article
  • Data Source
    • IRDB

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