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Fabrication of micro/submicron hierarchical structures on ceramic sheet surfaces combining 2-step imprinting and in-plane compression processes
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- Taira, Ryoma
- Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyushu University
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- Tsumori, Fujio
- Department of Aeronautics and Astronautics, Faculty of Engineering, Kyushu University
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Description
Many organisms have functional microstructured surfaces. Particularly, lotus leaves have hierarchical dual-scale micro/nanostructures on their surface and exhibit highly water repellent properties. We have developed techniques to fabricate patterns on inorganic material surfaces such as ceramics. Applying these techniques to fabricate hierarchical structures can make ceramic surfaces even more promising. In this paper, we prepared 2 kinds of mold with line-and-space patterns with pitches 50 μm and 2 μm and fabricated micro (rough patterns)/submicron (fine patterns) hierarchical structures on sintered ceramic sheets using a newly developed imprinting process with in-plain compression method. We proposed processes for the fabrication of such hierarchical structures, discussed the possibility of higher resolution of the patterns by comparison with the analytical results.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 63 (3), 03SP89-, 2024-03-13
IOP Publishing
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Details 詳細情報について
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- CRID
- 1050866882762635520
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- NII Book ID
- AA12295836
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- ISSN
- 13474065
- 00214922
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- HANDLE
- 2324/7178642
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- Text Lang
- en
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- Article Type
- journal article
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- Data Source
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- IRDB