Semiconductor microlithography VI, March 30-31, 1981, San Jose, California
Bibliographic Information
- Title
- "Semiconductor microlithography VI, March 30-31, 1981, San Jose, California"
- Statement of Responsibility
- Jim Dey
- Publisher
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- SPIE, the International Society for Optical Engineering
- Publication Year
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- c1981
- Book size
- 28 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000793836024064
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- NII Book ID
- BA23957158
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- ISBN
- 0892523085
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- LCCN
- 81051405
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- Web Site
- https://lccn.loc.gov/81051405
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
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- LCC: TK7871.85
- DC19: 621.381/71
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- Subject
-
- Data Source
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- CiNii Books