Microelectromechanical systems (MEMS) : presented at 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia

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Bibliographic Information

Title
"Microelectromechanical systems (MEMS) : presented at 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia"
Statement of Responsibility
sponsored by the Dynamic Systems and Control Division, ASME ...[et al.]
Publisher
  • American Society of Mechanical Engineers
Publication Year
  • c1996
Book size
28 cm
Other Title
  • Micro-electro-mechanical systems (MEMS)

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Details 詳細情報について

  • CRID
    1130000793850501120
  • NII Book ID
    BA29864650
  • ISBN
    0791815412
  • LCCN
    96078683
  • Web Site
    https://lccn.loc.gov/96078683
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • New York
  • Data Source
    • CiNii Books
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